光栅楔形平板及其在转角测量中的应用

Grating Wedge Disk and its Application in the Measurement of Rotating Angle

在楔形玻璃平板表面加工闪耀光栅 ,即构成了光栅楔形平板 ,本文详细介绍了其工作原理。将该光栅楔形平板用于双频激光干涉转角测量中 ,不仅简化了测量装置 ,减小了干涉仪的尺寸 ,而且装调方便。实验表明 ,其测量小角度分辨力优于 0 .1″,测量整周角度的重复性误差小于 5 %。

The grating-wedge plate is formed by making flare grating on a wedge plate of glass. As a new component, this grating-wedge plate is used in the measurement of rotating angle by a dual-frequency laser interferometer, which not only simplifies the devices, decreases the size of the interferometer but also makes the assembly of the optical path convenient. The experimental results show that the resolution of the small angle measurement is better than 0.1″ and the repeatability of 360° angle measurement is better than 5%.