高温超导薄膜衬底材料LaAlO_3单晶的超光滑表面抛光研究

Study on the Super-smooth Surface Polishing of the High Temperature Superconductor Film Substrate LaAlO_3 Single Crystal

本文以化学机械抛光为手段 ,以原子力显微镜 (AFM)为工具 ,对高温超导薄膜衬底材料LaAlO3 单晶的超光滑表面抛光进行研究。既观察到了由传统光学表面向超光滑表面过渡的过程 ,又观察到了超光滑表面加工的结果—表面的本征化。

In this paper,we studies the super-smooth surface polishing of the LaAlO 3 crystal by means of the chemical-mechanics polishing method and the atomic force microscopy (AFM) tool.LaAlO 3 crystal is a substrate material of high temperature superconductor.The process of the traditional optical surface transforms towards the super-smooth surface was observed,meantime,we also observed the result of super-smooth surface machining.It shows that the super-smooth surface polishing is very important to the surface of substrate as crystal epitaxy.