α-Fe_2O_3纳米薄膜的超声喷雾热解制备及其表征

Preparation and Characterization of Iron(Ⅲ) Oxide Thin Filmsby a Novel Spray Pyrolysis

采用超声喷雾热解制备技术在Si(III)基片上制备了α-Fe2O3纳米薄膜.选用0.01mol/L的Fe(acac)3乙醇/水(1:1)混合液作为前驱液,在衬底温度380℃及载气流量6L/min条件下,制备出平均粒径为4.1nm、具有(104)择优取向的纳米薄膜,并通过XRD,AFM等对其微观结构进行了表征.

Thin films of nanocrystalline hematite (α-Fe2O3) were deposited on silicon substrates by nebulization of a 0.01mol/L solution of iron acetylacetonate in a methanol/water mixture followed by pyrolysis and annealing in flowing air. The resulting films were characterized by X-ray diffraction, atomic force microscopy. The resulting films consisted of spherical grains and columnar order structure for Si(Ⅲ) with an average grain size of 4.1 nm, and highly crystalline α-Fe2O3 films with (104) orientation were obtained at a substrate temperature of 380℃and a carrier gas flow rate of 6 L/min.