组装用机械手稳定性研究

A Study of the Stability of the Robot Used in IC Assemblage

集成电路制作用机械手是三轴式伺服电机驱动系统。为保证其稳定工作,以达到±0.02mm的位置精度,本文依据极点配置原理,提出利用多参量反馈控制法,获得系统可靠的稳定裕度和良好的综合动态品质。

The robot used in IC manufacturing is a three axis system driven by sevomotors. In order to ensure its stable working and to reach a position precision up to ±0.02mm, based on the principle of poles layout, a method of multi-parameter feedback control is put forword in this paper to obtain a reliable system stability margin and a good integrated dynamic quality.