摘要
微电子设备 (激光调阻机 )中的运动控制系统是该设备的重要部分 ,它决定了设备的生产质量和生产效率。其特点是 :高精度、高速度、高效率、高可靠性。尤其是硬件发生故障或人工非法操作时 ,系统的自监控、自诊断显得特别重要。介绍采用多任务实时控制器 6K6 (美国PARKER) ,按照事件驱动响应方式设计控制直线伺服电机、交流伺服电机、步进电机的速度和定位精度 ;并通过输出接口模块对气动元件的电磁阀进行开关量控制使机械手运行自如 ;通过输入接口模块对多种传感器 (光纤传感器、对射式光电传感器、反射式光电传感器、接近式传感器、磁感应传感器。)进行监测等。使运动系统具有更高的可靠性、高精度和超高速 ,实现了产品的自动输送及完成生产过程中的各种相对运动。降低了产品的生产成本 ,提高设备效率 ,增强竞争能力 ,为实现现代化大规模生产提供了有力保障 。
The movement_controlling system in the micro_electronic equipment is one of the most important units, which influences its manufacturing quality and efficiency. It has many characteristics such as high precisioin, high speed, high efficiency and reliability. Especially, when its hardwares encounter any breakdowns or wrong operation, the self_examination and self_diagnosis of the system become more important. 6K6 multi_axis controller is the movement_controlling system kernel of a laser trimming system, which can control 8 axes at most through agility programmers. This paper introduces the design and control of the speed and location precision of the linear servo motor, alternative_current servo motor, directive_current servo motor by adopting 6K6 multi_task real_time controller according to the way of event_drive_response, control of on/off of the electric valve of the pneumatic kits to make the mechanical arms run smoothly through the export interface module, and supervision of many kinds of sensors through the import interface module, which endows the movement system with more reliability, higher precision and super high speed, and realizes auto_feeding of products and finishes all relative movements in production. The technology is useful for reducing the cost, enhancing the equipment efficiency and competition power, and promises large_scale production. It has filled the gap domestically.
出处
《光学精密工程》
EI
CAS
CSCD
2002年第2期176-181,共6页
Optics and Precision Engineering
