摘要
阐述了一种应用柔性铰链产生精密光学反射镜的弹性压弯机构的工作原理。应用经典力学方法对这种压弯机构进行了详细的力学分析 ,并将这种弹性压弯机构简化成平面钢架结构 ,用力法正则方程和梁的弯曲方程推导得出镜子的曲率与压弯机构参数及压弯驱动力之间的关系 ,即压弯机构驱动方程或镜子曲率方程。对影响镜子面形精度的弹性压弯机构参数进行分析 ,重点讨论了弹性压弯机构转动中心轴和镜子中性面不重合时对镜子面形精度的影响。分析了柔性铰链在这种弹性压弯机构中的作用及其对镜子面形精度的影响。并应用有限元数值计算方法对经典力学分析得出的压弯机构驱动方程进行验证 ,证实了经典力学分析的正确性。此压弯机构驱动方程可以作为这种弹性压弯机构设计的理论基础。
A flexural hinge_based mechanical bender is a very promising dynamical one for synchrotron optics, which is driven by two PZT actuators. It is cheap and energy_tunable, and the precision of the mitrofigure produced by this elastic bender is high. This paper analyses and discusses its working principles classically and systematically, and derives the driving equation, i.e., the relationship between the mirror shape and driving forces. The finite element method is employed to verify the correctness of the equation based on the classical mechanical analysis. The article focuses on the effect on the mirror curvature radius produced by the derivation between the rotational axes and the neutral plane of the mirror, and the role of the flexure hinge in this elastic bender. It concludes that the bender driving equation can offer academic basis for designing the elastic bender
出处
《光学精密工程》
EI
CAS
CSCD
2002年第2期220-225,共6页
Optics and Precision Engineering
基金
上海市教委科技发展基金项目 (No .2 0 0 0A37)
