一种确定X射线能谱仪(EDS)分析中接收角的方法

New Method of Measuring Take-off Angle in EDS Microanalysis

利用扫描电镜中物镜电流与焦距的关系 ,通过实验和计算得出了物镜电流调节旋钮刻度值与样品微区高低位置的对应关系。利用该关系得到了一种确定接收角的方法。该法易于应用且适于一些特殊样品接收角的确定。

Based on the rule of objective current and objective focus length in a SEM, the mutual relation between a graduation value of objective current regulator and a height value of sample micro\|area is determined through experiments and calculations. An easy use method of measuring take\|off angle in microanalysis with a EDS mounted on the SEM is obtained by the above relation. It can also be used to the measurement of take\|off angle of some especial samples.