SrTiO_3斜切基片上外延生长YBa_2Cu_3O_(7-δ)薄膜的扫描探针显微镜研究

Direct Observation of Epitaxial Growth of YBa_2Cu_3O_(7-δ) Thin Films on SrTiO_3 (001) Vicinal Substrates by Scanning Probe Microscopy

采用激光脉冲沉积法在钛酸锶SrTiO3 (0 0 1)斜切基片上外延生长YBa2 Cu3 O7 δ薄膜 ,在大气环境下采用扫描探针显微镜对YBa2 Cu3 O7 δ薄膜的表面纳米形貌进行直接观察。发现YBa2 Cu3 O7 δ薄膜具有相对光滑的表面形貌 ,薄膜表面由沿SrTiO3台阶趋向外延生长的纳米台阶组成 ,薄膜生长模式主要以台阶媒体生长为主。

Epitaxial growth of YBa2Cu3O7-δ thin films on SrTiO3 (001) vicinal substrates was prepared by pulse laser deposition. SPM was used to observe the topography and structure of YBa2Cu3O7-δ thin films in ambient condition. Smooth YBa2Cu3O7-δ thin films with regular steps were directly observed. The growth mode was mainly the step-flow growth along SrTiO3 step edges.