LIGA技术及其在微驱动器中的应用
LIGA technologies and their applications in microactuators
摘要
介绍了LIGA加工工艺以及多层掩模技术、复制技术和外形磨削成型技术的现状。给出LIGA技术在微驱动器中的应用。
LIGA process and the actualities of multiple masks technology,replication technolo gy and contour polishing tech nology are introduced.The application of LIGA technologies in mi croactuators are presented.
出处
《微纳电子技术》
CAS
2002年第3期33-38,共6页
Micronanoelectronic Technology
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