摘要
在微力微位移装置中采用闭环控制压电作动器实现微位移进给和微力加载 ,设计了加载机构 ,建立加载机构的压电作动器输入电压、加载装置输出位移和输出力之间的关系。通过电容测位移仪检测输出位移 ,实验得到加载系统刚度 ,根据压电作动器输入电压、加载装置刚度 ,计算出加载力大小。
A loading system driven by PZT actuator,aiming at a testing instrument for determining mechanical properties of microstructure by relation between load and displacement is designed.The relation among the input voltage to actuator,output displacement of loading system and output force is established.The output force is determined as function of input voltage and output displacement after stiffness is obtained by experiment.Study on this mechanism lays a foundation for developing the instrument for mechanical properties of microstructure.
出处
《压电与声光》
CAS
CSCD
北大核心
2002年第2期101-103,共3页
Piezoelectrics & Acoustooptics
基金
国家重点基础研究发展规划基金资助项目 (批准号 :G19990 3 3 10 3 )
