一种简便的介质缺陷检测方法

A Simple Method for Dielectric Defect Detecting

本文介绍了一种简单实用的介质缺陷检测方法。采用这种方法可检测介质生长过程中形成的介质针孔,也可检测因介质应力发生改变所引起的缺陷(在本文中简称为“应变缺陷”)。它将为研究针孔密度低的介质生长工艺和应力匹配性能优良的工艺技术提供一种简便的检测诊断方法。

A simple and practical method for dielectric defect detecting is introduced in this paper. It can be used for the delecting of pinholes in dielectrics formed during its growth and detecting of defects induced by changes in the stress of dielectrics (referred to as'stress defect' in the paper). This-Simple delecting/diagnostic technique is very useful in developing low-density dielectric growth process and process technologies with good stress match.