摘要
利用复合结构原理,研制出“硼硅玻璃+α-石英+硅酸锌”率低烧低介陶瓷材料,利用XRD、HP4194频谱仪,SEM分析了该材料的晶相组成,介电性能及显微结构,结果表明:在高频下,该材料具有很低的介电常数(K=4-5,1MHz)和很低的介电损耗(tanδ<0.001,1MHz),同时能在低于900℃温度下烧中,该材料是一种理想的适用于高频(1GHz以上)多层片式电感(MLCIs)元件用的介质材料,同时得出:在该组成中,硼硅玻璃重烧结的过程中有方英析出;少量硅酸锌由于锌离子进入玻璃中而转变为亚硅酸锌;硅酸锌在该组成中有助烧结的作用,该材料介质性能随频率的变化与德拜方程的描述基本吻合。
The low temperature sintering and low dielectric properties ceramic materials of ' borosilicate glass+ alpha-quartz+zinc silicate ' system were prepared by applying the principle of the componund structure. The crystal phases, dielectric properties and microstructure of the all sintering samples were analyzed by X-ray diffraction (XRD), HP4194ALCR analyzer and scanning electron microscopy (SEM) respectively. The results show these materials possess very low dielectric constant (K=4-5, 1MHz)and very low dissipation factor (tanδ<0. 001, lMHz)in high frequencies. And they can be sintered below 900℃. These materials are promising dielectric materials for high frequencies(≥lGHz) mulitlayer chip inductors (MLCIs). In the mean while, new crystalline phase of cristobalite is formed during re-sintering the borosilicate glass and ZnSiO3 phase is formed from zinc silicate visa zinc ions melting into the glass net. Zinc silicate phase is of an aid-sintering function. The changes of dielectric properties of the samples with frequencies are fit with Debye equation.
出处
《无机材料学报》
SCIE
EI
CAS
CSCD
北大核心
2002年第3期497-503,共7页
Journal of Inorganic Materials
基金
国家自然科学基金(69995523)