摘要
本文讨论了强流离子注入机的全机械扫描靶室中实现剂量高均匀性和高重复性注入的变速扫描设计原理及控制技术。
Design principles of speed change scanning and control techniques to realize high uniformity and high repeatability of implantation dose in full mechanical scanning target chamber of high current implantation system are discussed.
出处
《微细加工技术》
1991年第1期7-13,共7页
Microfabrication Technology
关键词
离子注入
均匀性
机械扫描
Ion implantation system
Mechanical scanning
Uniformity of implantation.
