摘要
本文介绍了化学束外延(CBE)的发明和发展,论述了CBE的原理和设备。文中还介绍了最近提出的一种生长机理。
Investigations and applications of CBE are introduced. Also included is a description of the principles and equipment of CBE,along with the new growth mechanism
出处
《微细加工技术》
1991年第2期72-75,共4页
Microfabrication Technology
