摘要
本文描述了改进型潘宁离子源在活性化学反应机理作用基础上获得难熔金属离子。研究了源结构和引束上活性气体的影响,并获得有关结果。
An improved Penning ion source which can deliver refractory metal ions on the basis of active chemical reaction mechanism is described. The influences of source structure and reactive gases on delivered beams were investigated and the related results were achieved.
出处
《微细加工技术》
1991年第3期1-4,共4页
Microfabrication Technology
