摘要
本文讨论了影响常规静电扫描系统的均匀性的因素,并提出一种离子注入机的计算机控制扫描系统。
Factors that affect the uniformity in normal electrostatic scanner system are discussed. A computer control scanning system for ion implanter is also described.
出处
《微细加工技术》
1991年第3期16-21,共6页
Microfabrication Technology
