摘要
本文描述了材料表面改性或优化的新型宽束离子束混合装置。系统含有引出离子不同能量范围的三种离子源。可用于单离子注入,离子束混合,单离子或反应离子束溅射淀积以及离子束增强淀积。它装备有大的水冷却台,可进行各种复杂的运动,以满足处理各种复杂形状的大的工件的需要。本文还对该机的两种使用实例做了介绍。
A new broad ion beam mixing system for surface modification or optimi zation of materials is described,, The system has three ion sources with different energy range of extracted ions. It can be used for single ion implantation, ion beam mixing, single ion or reactive ion beam sputter-deposition and ion beam enhanced deposition. It is equipped with a large and water-cooled stage, which can make a variety of complex motions to meet requirements of processing various large workpieces of complex shape. Two application examples of this machine are also presented.
出处
《微细加工技术》
1991年第3期12-15,28,共5页
Microfabrication Technology
