摘要
国内引进了不少离子注入机,维修问题日渐重要。对其损坏部件,用国产配件进行替换,不乏为又快又省的维修方法。本文叙述了八年多来,我们在维修IM—200M型离子注入机的实践中,对损坏的吸极电源、氟里昂热交换器和化学机械泵等重要部件,用自制的或改制的国内配件进行替换,从而保证了设备安全运行二万五千多小时,注入八万五千多块硅及GaAs靶片,完成了集成电路研制和开发任务。
More and more implanters are imported from abroad, their maintenance is going to be a serious problem,, Using home-made parts as replacements would be easy to perform with low cost. This paper presents the experience in maintenance of extractor power supply,freon heat-exchanger and chemical-me chanical pump of model IM-200M ion implanter during past eight years. By these experiences a safe run of this apparatus for 25000 hours period has been achieved. More than 85000 wafers of Si and GaAs were implanted. The task of research and development of IC has been accomplished.
出处
《微细加工技术》
1991年第3期9-11,共3页
Microfabrication Technology
关键词
离子注入机
部件
国产化
替换
Ion implanter
Maintenance
Replacement by home-made parts.
