离子束混合工艺对材料抗蚀性能的影响

EFFECT OF ION BEAM BOMBARDING MIXTURE ON CORROSION RESISTANCE OF MATERIALS

本文介绍了离子束混合工艺方法。与直接注入相比较,离子束混合所使用的设备造价低1/4—1/2,而生产效率可提高1—2个数量级,因而使生产成本大幅度降低,这无疑对离子束工艺的实际应用将产生巨大的促进作用。 通过对轴承材料(GCr15和Cr4Mo4V)经Cr、N、Ta不同元素的混合处理后,在0.5M H_2SO_4和0.1M NaCl的缓冲溶液中的阳极极化曲线表明经混合处理后的两种材料试样,其抗蚀能力和抗点蚀能力均大大提高,这与直接注入的试样效果是一致的。 通过俄歇谱仪和透射电镜的分析结果表明混合是成功的,且在一定的条件下,形成非晶组织。 本文的结论是,无论是离子的直接注入还是离子束混合,对提高轴承材料的抗腐蚀性能都是有效的方法,特别是离子束混合技术具有更大的应用前景。

The method of ion beam bombarding mixture (IB BM) is introduced. Comparing with direct ion implantation, the cost of equipment of IBBM is only half or a quarter of that of implanter and the productivity can be increased by 1-2 order. Therefore the productive cost could be reduced significantly. It would no doubt promote the practical applications of ion beam process greatly. When the bearing materials (GCr15 and Cr4 Mo4V) are processed by Cr, N, Ta bombarding mixture the anodic polarization curves in 0.5M H2SO4 and 0.1M NaCl buffer solution show that the localized and normal corrosion resistance of two kinds of test pieces are improved largely. These art similar to the results achieved by direct implantion. The analysis of AES and TEM indicates that the mixing is successful and amorphous layer is formed in certain conditions. The conclusion is as follows: either direct implantion or IBBM is effective way to improve corrosion resistance of bearing materials, especially the process of IBBM has a good future for industrial applications.