碰撞效应对入射到射频偏压电极上离子能量分布和角度分布的影响

Collisional effects on ion energy and angular distributions incident on RF-biased electrodes

考虑了离子与中性粒子的弹性碰撞和电荷交换碰撞效应 ,建立了一套描述射频等离子体鞘层动力学特性的自洽模型 ,并利用Monte Carlo模拟方法研究了入射到电极上的离子的能量分布和角度分布 .数值结果表明 :随着放电气压增加 ,入射到电极上离子的能量分布逐渐地由双峰分布变成单峰分布 ,而且低能离子的数目也逐渐地增加 .入射到电极上的离子呈小角分布 ,而且放电气压等参数对角度分布的影响不是太明显 .

Taking into account elastic collisions and charge-exchange collisions between ions and neutral particles, we established a self-consistent model describing the dynamics of radio-frequency (RF) sheath driven by a sinusoidal current source, and also, using the Monte-Carlo Method, simulated energy and angle distributions of ions bombarding on RF-biased substrates. It has been shown from numerical results that as increasing the discharge pressure, bimodal-peaks distributions for the ion energy become gradually a single-peak distribution, and low-energy ions increase. We also found that the angle distribution of ions is narrow and almost do not change with increasing the discharge pressure.