摘要
提出用磁控溅射在弹性元件的表面生成TiN薄膜的方法 ,阐述了二元线性插值法智能补偿的原理和效果 ,实现了响应快和精度高的要求。
A method of depositing thin film TiN on surfaces of elastic cells by magnetron sputtering and the principles and techniques of duality line intellective compensation was presented. Quick respondse and high precision of liquid level measurement has been realized.
出处
《仪表技术》
2002年第1期49-50,共2页
Instrumentation Technology
