SMIF系统在集成电路制造中的应用

The Application of SMIF In The Integrated Circuit Manufacture

本文介绍的是一种全新概念的集成电路制造工艺环境实现方案,技术先进,实用性强,提高国产集成电路的成品率有非常重要的作用。

The text introduces that is craft environment of project that realizes about the integrated circuit manufacture of an all new concept.Its technique is advanced,the function is strong.It is important for improving the integrated circuit's finished producet rate.