氮化钽薄膜局部腐蚀早期过程的原位研究

In Situ Investigation of Early Localized Corrosion Stages of TaN Films

利用离子束增强沉积 (IBED)技术在 1Cr18Ni9Ti奥氏体不锈钢上制备了TaN薄膜 ,并通过电化学原子力显微镜 (ECAFM)对TaN薄膜在NaCl溶液中的腐蚀早期过程进行了原位研究 ,重点观察了微观缺陷处的腐蚀状况。结果表明 ,在TaN薄膜的腐蚀早期阶段 ,腐蚀并非从缺陷处开始 ,反而在有坑的位置形成更厚的钝化膜 ,表现出较好的整平性 。

TaN films were deposited onto type lCrl8Ni9Ti austenitic stainless steel by using ion beam enhanced deposition (IBED) technique. In situ electrochemical atomic force microscopy (ECAFM) was used to study the early corrosion stages of TaN films in NaCl solution, and emphasizing on the corrosion at the defect site. Results showed that in the early stages the corrosion of TaN films didn't begin from the defect but form thicker passivation film in the hollow, which showed a much better flattening capability and decreased the corrosion rate.