离子束混合Fe—Cr非晶薄膜的耐蚀性研究

INVESTGATION ON CORROSION RESISTANCE OF AMORPHOUS FILMS PREPARED BY ION BEAM MIXING

在离子注入机靶室中,用原位蒸镀多层薄膜和离子束混合方法获得了非晶 Fe-Cr薄膜。用透射电镜分析了 Cr 的含量、不同的轰击离子、不同的轰击剂量对膜的非晶化程度的影响。用动电位极化方法研究了薄膜的耐腐蚀性,所得非晶薄膜在0.5mol 的 H_2SO_4溶液中的耐腐蚀性较纯 Fe 有较大的改善。用 XPS 技术研究了经 P^+混合非晶 Fe-Cr 钝化膜的大气耐蚀性,证实了 Cr 和 P 在薄膜表面层的富集。

Fe-Cr amorphous films have been formed by both in situ evaporation of multilayered films and ion beam mixing in a target chamber of a 200 keV inplanter The effects of Cr content and ion irradiation on the amorphization of films were examined by transmision electron microscope(TEM).Corrosion of film was investigated by means of a potention dynamic po1arization.Cor- rosion resistance of amorphous film in 0.5mol H_2SO_4 solution is considerably increased than that of pure iron Using X ray photoelctron spectroscopy(XPS) corrosien resistance in atmosphere of amorphous Fe-Cr passive films formed by P+ mixing was studied.Results show that the richness of Cr and P exist at the surface of Fe-Cr film.