主动控制空气支承动态特性的研究与优化

ANALYSIS AND OPTIMIZATION OF THE DYNAMIC CHARACTERISTICS IN A ACTIVE CONTROLLED AIR BEARING SYSTEM

基于现代控制理论,提出了一种新型的主动型空气支承,不改变供气压力,利用压电陶瓷（PZT）的伸缩量来补偿空气膜厚度随外部干扰的变化对支承精度的影响。在建立理论模型的基础上,介绍了二维自由度控制器的优化设计方法,使系统具有精度高、响应速度快和抗干扰能力强的特点,并对主动空气支承系统的动态特性进行了分析研究,为主动空气支承的应用提供了理论依据。

A new active controlled air bearing is presented based on the modern control theory. In the system, the micro-displacement of piezoelectric ceramics is used to compensate the bearing's error caused by the vary of air membrane thickness with internal interference under the stable pressure of air supply. Based on the theoretical model, the optimal design of 2-D controller is introduced, so that the system has many advantages : high precision, fast respond, powerful anti-interference, and the analysis of dynamic characteristics about bearing system is achieved. A theoretical basis is provided for application of active controlled air bearing.