阵列半导体激光器的光束参数测量与光纤耦合

Beam parameter measurement and fiber coupling of laser diode array

采用ISO推荐的方法测量了发光面为 1μm× 15 0 μm的阵列半导体激光器的光束半径、远场发散角、束腰位置、瑞利长度 ,并根据测量结果计算了光束传输因子 (M2 因子 )。以此为基础 ,研究了半导体激光器光束的快轴准直以及光纤耦合技术 ,采用微柱面透镜准直后 ,阵列半导体激光器快轴方向发散角可减小到 0 .48°。设计了光纤耦合光学系统 ,与 10 0 μm光纤耦合时的耦合效率为 71.0 % ,与 2 0 0 μm光纤耦合时的效率为 83.4%。

Beam parameters of laser diode array (LDA) with an emitting area of 1μm×150μm were measured by using the method suggested by ISO. The waist widths, divergences, waist positions, Rayleigh lengths and M 2 factors of the LDA in x, y direction were determined. By using the micro-cylindrical lens as the fast axis collimator, the divergence of LDA was reduced to less than 1°. Optical system for coupling of LDA was designed, which yields coupling efficiency of 71.0% and 83.4% for 100μm and 200μm fibers, respectively.