基于线阵CCD的全息光栅位移自动测量系统的研制与开发

Manufacture and exploiture of holographic grating displacement auto-measuring system based on linear CCD

提出了一种新型的基于线阵CCD的全息光栅位移传感器 ,该系统利用线阵CCD分辨率高、像素均匀等特点 ,对干涉条纹的移动进行精确定位 ,全息光栅在测量过程中具有不受光源波长的影响、适用光谱范围宽等特点 ,实现了位移的自动精确测量。给出了系统误差分析及结果数据 ,经实验 ,系统稳定可靠 ,精度高。

A kind of new holographic grating displacement sensor based on the linear CCD is made. This system carries out accurate location to interference stripe movement by using high resolution capacity and resembles plain in color characteristic of CCD. Holographic grating is not affected by the wavelength of light source in measuring course, and has wide applicable spectrum scope. The auto-accurate measurement of displacement was realized. The system error analysis and result data are given. The system is proved to be steady and reliable by experiment.