基于M型分划丝的单线阵CCD直线度准直仪

Single linear CCD linearity collimator based on M shape reticle

为使直线度准直测量一次性自动完成 ,提出了一种结合M型分划丝 ,采用单线阵CCD器件 ,应用激光准直原理测量二维小位移和第三维小角度的全新方案 ,阐述了测量的基本原理、系统组成及硬件设计。实验表明 ,直线度准直仪在 70m距离内准直精度可达 13μm ,在± 2 0°测角范围内测角精度达 0 .7″。

For collimating to be automatically finished in one time, a novel method of measuring two-dimensional small displacement and the third dimensional small angle with laser collimating theory by single linear CCD and M shape reticle is presented. The basic measuring principal, components of system and design of hardware is elaborated. The experiment shows that the collimating accuracy of the instrument reaches 13μm within 70m, and the measuring accuracy of angle reaches 0.7 arcsecond.