摘要
为了研究微机械摩擦问题，设计了一组硅微弹簧摩擦力测试结构，并对其进行了静力学分析，导出系统弹性系数的计算方法，分析了强度及应力分布特点。对比ＡＮＳＹＳ仿真结果，分析了两种分析方法的差异原因，得出微结构中拉簧对测试微结构力学性能影响最大，弯簧根部应力最大，而拉簧直角拐弯处应力最大。
For study the friction in MEMS, a set of micro-silicon structures of spring-shattle friction measurement was been designed. Some static problem was be analyzed for them. And then the calculation method of elasticity coefficient and strength and stress was been derived. Compared with the simulation results of ANSYS, it is found that the meander spring plays the more important role in the mechanics of microstructure. To the bending spring, the root stress is biggest; and to the meander spring, the corner stress is biggest.
出处
《机电一体化》
2002年第2期17-20,共4页
Mechatronics
基金
国家自然科学基金资助项目(No. 59875055)
