摘要
本文提出了一种利用激光非接触式测量微小孔径的方法。该方法以小功率激光器与被测小孔作为光学检测系统,以高分辨率电荷耦合器及单板机作数据采集与处理系统,可实现高精度、自动检测和连续显示。实验结果证明该方法切实可行。
This paper presents a method of using optical non-touching diffraction technique to test diameters of small apertures. Since this method uses charge-coupled devices and single board computer as photoelectric conversion and data processing system, it could realize high precision and automatic measure. Experimental results showed this kind of method can be in a good work.
关键词
电荷耦合器
微孔
测量
数据处理
charge-coupled devices (C C D)
A/ D conversion
data processing
optical testing Fraunhofer diffraction
