摘要
本文以16M位、64M位集成电路工厂纯水为实例,介绍了两套超纯水装置的处理流程与制水特点,它们均已通过一年多运转的考验,处理效果稳定,水质指标分别达到了设计水质要求。
Take the example of pure water in IC fab of 16 Mb and 64 Mb to explain the process flow and its features of two sets of ultrapure water installations. All had been in operation stably for over one year. The pure water quality had met the designing requirements.
出处
《洁净与空调技术》
2002年第1期22-26,共5页
Contamination Control & Air-Conditioning Technology
