空心阴极重离子源的研究

THE STUDY OF THE HOLLOW CATHODE HEAVY ION SOURCE

本文对一台空心阴极重离子源的放电参数、引出参数之间关系进行了理论分析及详细测量,从中找出离子源最佳的工作状态。文中得到的结论适用于等离子体离子源。调试结果,本离子源稳定地工作于引出总束流强度为0.5-1.0mA,归一化亮度≥2×10~9A/m^2·rad^2,等离子体密度为10^(11)～10^(12)cm^(-3),电子温度为5～10eV,能散度≤40eV。

In this paper, the relation between the discharge and extracting parameters of a holloy cathode heavy ion source is theoretically analysed and carefully measured. From the analyses the optimum performance state of the ion source can be found. The results of this poper are applioable to all the Plasma ion source. The experimental results indicate that the ion source can work steadily, its extracted ion beam current is 0.5-1 mA, normalized brightness ≥2×10~9A/m^2 ·rad^2, the plasma density is 10~11-10~12cm^(-3) the electron temperature is 5-10eV and the energy spread 40 eV.