半导体微碟激光器设计原理与工艺制作

Design Principle and Fabrication of Semiconductor Microdisk Lasers

用经典量子电动力学理论初步研究了半导体碟型微腔激光器的设计原理 ,采用光刻、反应离子刻蚀和选择化学腐蚀等现代微加工技术制备出抽运阈值功率很低且品质因数很高的低温光抽运InGaAs/InGaAsP多量子阱微碟激光器。这种激光器制作工艺简单 ,对有效光子状态密度调制较大 ,是比较理想的半导体微腔激光器。

The design principle of semiconductor microdisk lasers was studied by classical quantum electrical dynamic theory. Low temperature optical pumped InGaAs/InGaAsP multiple quantum wells (MQW) microdisk lasers with very low threshold pumping power and very high quality factor have been fabricated by modern micro-processing technologies including photolithography, reactive-ion etching and selective chemical etching. It is suggested that the semiconductor microdisk lasers is the most ideal semiconductor microcavity lasers for their simple fabrication technology and large modulation to the effective photon state density requested.