相位测量轮廓术中探测器非线性误差的分析

Analysis of errors introduced by detector nonlinearity in Phase Measuring Profilometry

在相位测量轮廓术 (PMP)中 ,探测器的非线性响应是导致测量误差的重要因素 ,本文对该误差进行了理论分析和计算机模拟 ,比较了各种相移算法对这一误差的抑制能力 ,数值模拟与理论分析的结果一致。本文可为实际应用中合理地选择算法提供理论依据。

In Phase Measuring Profilometry detector nonlinearity is the main factor introducing the errors of the measurement.This paper gives the theoretical analysis and the computer simulation of this kind of error,and compares the ability of tolerance for detector nonlinearity among N-frame phase shifting algorithms.The results of numerical simulation and theoretical analysis are consistent and it gives us a theoretical basis of selection of algorithms.