溶胶-凝胶法中热处理对PMNT薄膜结构的影响

Influences of Heat Treatment on the Structure of PMNT Thin Films Derived by Sol-Gel Process

研究用溶胶－凝胶方法制备ＰＭＮＴ（铌镁酸铅）薄膜的工艺过程．通过ＸＲＤ和ＳＰＭ系统地分析了热处理条件（热解温度和退火条件）与ＰＭＮＴ薄膜的形态．结晶和取向的对应关系，已建立起制备高度取向 ＰＭＮＴ薄膜的工艺．并成功地在Ｐｔ／Ｔｉ／ＳＩＯ２／Ｓｉ衬底上制备成（１１１）取向的ＰＭＮＴ薄膜．

PMNT (Lead Magnesium Niobate Titanate) thin films with preferred orientation were deposited on Pt/TiO2/SiO2/Si substrate by a sol-gel process. The influence of the technological process on morphology, crystallization and orientation of films were investigated by XRD(X Ray Diffraction) and SPM(Scan Probe Microscope). The optimum process for preparing PMNT thin film with high orientation was established.