振子框架式微机械陀螺的优化设计及电学模拟

OPTIMUM DESIGN AND ELECTRICAL SIMULATION OF COMB-GIMBAL MICROMACHINED GYROSCOPE

根据驱动模态频率和检测模态的频率相互匹配 ,用有限元法优化了振子框架式微机械陀螺的结构尺寸 ;根据建立的陀螺振动的等效电路模型 ,对检测振动的性能进行了模拟分析 ,该模型为传感器与接口电路的整体模拟打下了基础。

First according to the matching of driving mode frequency and detection mode frequency, the structure dimensions of the comb gimbal micromachined gyroscope are optimized using a finite element method (FEM). Then an equivalent circuit model of gyroscope's oscillating properties is derived, which is available in detection oscillating properties analysis and also enables the sensor simulation with the interfacing electronics.