内表面粗糙度在线测量仪

On-line internal surface roughometer

为满足军工产品的在线测量需要 ,开发了一种基于光散射原理的便携式内表面粗糙度在线测量仪。它利用半导体激光器为光源 ,光电二极管阵列接收与表面粗糙度具有对应关系的散射光带。由于采用了远心光路的设计和对光源进行了电光调制成功地提高了仪器的测量精度和抗干扰性能。仪器的测量范围Ra:0 .0 0 5～ 1.6 μm ,测量相对误差δ<5 % ,测量重复性优于± 2 % ,适合对多种机加工形成的零件的内。

For meeting the need of production on-line measurement in the war industry,the portable on-line internal surface roughometer based on light scattering from a rough surface was developed.It uses a laser diode as light source and a linear photodiode array to record the light-scattering band,which correlated to the surface roughness.Because the electronic-light modulation and telecentric optical system were adapted in the instrument,the better measuring accuracy and anti-interference can be gotten.The designed apparatus is suitable in a wide range of application.Its measuring range is:0.005～1 6μm(Ra),measuring error δ<5% and measuring repeatability<±2%.It can be implemented for the on-line non-contact measurement of both external and internal mechanical processing surface.