摘要
本文采用波长 2 4 8nm的KrF准分子激光器 ,对Al2 O3 陶瓷片的精密加工进行了研究 ,探讨了各种工艺参数对加工质量的影响规律。同时研究了激光工艺参数对材料表面粗糙度的影响 。
In this paper,the process studying of precision machining Al 2O 3 ceramics tile with KrF(λ=248nm)excimer laser was carried out,the effects of processing parameters on quality of precision machining were studied.The effect of laser parameters on surface roughness of workpieces was studied too,analyzing surface topography of machined workpiece.
出处
《激光杂志》
CAS
CSCD
北大核心
2002年第2期59-61,共3页
Laser Journal
基金
教育部高等学校骨干教师资助计划资助
