摘要
介绍了一种新颖的DC-50GHz低相移、多功能的GaAs MMIC可变衰减器的设计与制作,获得了优异的电性能。微波探针在片测试结果为:在DC-50GHz频带内,最小衰减≤3.8dB,最大衰减≥35±5dB,最小衰减时输入/输出驻波≤1.5,最大衰减时输入/输出驻波≤2.2,衰减相移比≤1.2°/dB。芯片尺寸为2.33mm×0.68mm×0.1mm。芯片成品率高达80%以上,工作环境温度达125℃,可靠性高,稳定性好。
Design, fabrication and performance of a novel multi-function low phase shift DC-50GHz MMIC voltage control variable attenuator are introduced in this paper. High performance has been obtained. Over DC-50GHz, test results by on-wafer microwave probe system are: minimum attenuation ≤ 3. 8dB, maximum attenuation ≥ 35 ±5dB, input/output VSWR at minimum attenuation≤ 1. 5, input/output VSWR at maximum attenuation≤2. 2, phase shift attenuation≤ 1. 2°/ dB. The chip size is 2. 33mm × 0. 68mm × 0. 1mm. The yield of the chips is over 80%. Its operation environmental temperature is 125℃ and it has high reliability and stability.
出处
《电子元器件应用》
2002年第1期16-18,共3页
Electronic Component & Device Applications
关键词
砷化镓
集成电路
移动通信
相移
可变衰减器
可靠性
GaAs MMIC
Super wideband
Low inserted phase shift
Multi-function
Variable attenuator
Yield
Reliability
