摘要
多晶硅是一种重要的半导体材料,广泛地应用于现代电子工业中。硅元件作为控制设备的器件,是电子计算机中不可缺少的部件。本文介绍了多晶硅的性能、用途及制备工艺。
Polysilicon is one of the important semiconductor materials and widely used in modern electronic industry, particularly it is used to manufacture the components of control device in electronic brain. Its properties, usage and the manufacturing process are described in detail.
出处
《材料工程》
EI
CAS
CSCD
北大核心
1989年第1期20-22,共3页
Journal of Materials Engineering