影响CMP用纳米Al_2O_3磨粒粒度均一性的因素及其机理

Factors and Mechanisms Influencing Granularity Uniformity of Nano-sized γ-Al_2O_3 Abrasives for preparing CMP

系统地研究了制备CMP用纳米γ Al2 O3 磨粒时影响粒度及其均一性的各种因素 ,并对其机理进行了探讨。确定了控制粒度及粒度均一性的最佳条件 ,制得了均一性好的γ Al2 O3

Various factors which influence granularity and uniformity of nano sized γ Al 2O 3 abrasives for preparing CMP are studied systematically,and their mechanisms are discussed theoretically. The optimum conditions controlling the granularity and uniformity have been established and better uniformity γ Al 2O 3 abrasives have been prepared.