摘要
采用摩擦力 -划痕法评定了 PVD Ag- Cu/Ti/stainless!steel双层薄膜的结合强度 ,测得其顶层与底层及底层与基体间的临界荷载值分别为 LC1、LC2 ,其中 LC1随膜厚的增加而减小 ,LC2 随膜厚的增加变化不大 ,且和Ti单层膜的 LC值相近。这与膜厚及膜内应力变化有关。实验结果表明 ,采用摩擦力 -划痕法评定多层薄膜结合强度有其独特的优点。可以确定多层膜中不同膜层的 LCi值 ,并以此来表征各层或某些层的结合强度值。
Adhesion of PVD Ag-Cu/Ti/stainless steel bilayer is assessed by friction-scratch. The critical loads of its top layer/bottom layer and bottom layer/substrate are L c1 and L c2 respectively.With changing the thickness of bilayers, the value of L c1 is increased,but the change of L c2 is not evident, which may be related to stresses in the bilayers. The experimental results show that adhesion measurement of multilayer films by friction- scratch has its own particular merits,which can measure adhesion(Lci) of different layer in mulilayer films by friction-scratch. So friction-scratch is promising to be as a simple and effective method for adhesion measuement of multilayer films.
出处
《中国机械工程》
EI
CAS
CSCD
北大核心
2002年第11期984-986,共3页
China Mechanical Engineering
基金
国家自然科学基金资助项目 ( 5 970 5 0 0 9)
中国科学院化学物理研究所固体润滑国家重点实验室资助项目 ( 9811)
