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纳米加工和材料去除机理研究 被引量:2

RESEARCH ON NANO-CUTTING AND MECHANISM OF MATERIAL REMOVAL
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摘要 针对钠米技术、微型机械在未来工程应用中对纳米级加工的要求,提出将扫描探针显微镜的技术和原理应用于纳米机械加工过程,实现纳米量级加工的可控性和加工结果的可观察性。给出了采用该方法进行纳米切削加工的试验结果,表明这一方法具有稳定、可靠的微加工性能。观察结果显示了材料去除加工的微观过程,被去除材料在刃前发生剪切变形前,与之约成90°的前刀面方向上切屑已充分变形。 An experimental study on cutting material at nanometer scale is conducted by applying the principle and technology of scanning probe microscope (SPM). It is revealed from the experiments that cutting inside SPM is an excellent and direct way to research the material removal process at small size. Based on the experimental results, the mechanism for the chip formation in the cutting of amorphous alloy is discussed. It is found that the deformation along the direction of chip flow occurres at first before localized shear really happened, and a simplifying geometrical model is proposed to illustrate the deformation.
出处 《机械工程学报》 EI CAS CSCD 北大核心 2002年第6期36-39,共4页 Journal of Mechanical Engineering
基金 广东省自然科学基金(010033) 福建省自然科学基金(E0110025)资助项目。
关键词 材料去除机理 扫描探针显微镜 纳米加工技术 切屑形成 Scanning Probe microscope Nano-machining Chip formation
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