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基于行星式平面研磨机研抛过程的运动几何学分析 被引量:28

ANALYSIS OF KINEMATIC GEOMETRYON FACE GRINDING PROCESS ONLAPPING MACHINES
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摘要 分析了广泛采用的行星式平面研磨抛光机的运动原理,以节点、节圆入手,将复杂的研抛运动转化为在定中心距条件下的两个绕定轴的回转运动,分析了工件相对于研磨盘、研磨盘相对于工件的轨迹曲线,以及两者的关系,以切削速度、切痕方向角、切痕方向角对时间的变化率为纽带,将研磨抛光的几何分析与提高工件表面的加工质量联系起来,得出了优化的轨迹曲线及运动参数。 The kinematic theory of face grinding process on lapping machines is analysed. By means of pitch point and pitch circles, the complicated grinding process is converted into two rotations on condition that center distance is fixed. Two types of path curves and their relations are analysed, i.e. workpiece against grinding wheel and grinding wheel against workpiece. The geometrical analyses and manufacture quality of workpiece are linked with the aid of cutting velocity, range of rotational angle of cutting traces and derivative of the rotational angle with respect to time. The optimal path curve and kinematic parameters are achieved, and these results are correspond to the experimental results[1].
出处 《机械工程学报》 EI CAS CSCD 北大核心 2002年第6期144-147,共4页 Journal of Mechanical Engineering
关键词 研抛过程 平面研磨机 轨迹曲线 节圆 优化方案 回转运动 Lapping machine Path curves Pitch circles Optimal scheme
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  • 11,Venkatesh V. C.、Inasaki I、Toenshoff H. K.、Nakagawa T. and Marinesc u I. D.,Polishing and Ultraprecision Machining of Semiconducter Substrate Mater ials,Annals of the CIRP,1995 44(2):1~7.
  • 22,Yasunaga N.,Recent Advances in Ultraprecision Surface Finshing Techn logies in Japan,Int.J,Japan Soc.Proc.Eng,1994 28(3)191~195.

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