摘要
微透镜阵列与针孔阵列的组合光学器件是全场共焦检测系统中的一个关键器件。微透镜中心与针孔中心要求严格对准 ,相应的装配对准精度应控制在几微米之内。本文给出了一种可进行 5自由度高精度调节 ,并利用光学显微镜进行实时监测的对准方法。
Micro optics component is an important part of the multiple beam confocal system which is popularly studied these days It is composed of microlens array and pinhole array,and these two separate components are both high precision parts,hence aligning them is the key technology of the micro optics device In this paper,an aligning method for micro optics component is inferred A vernier device with 5 free degree and a microscope with CCD equipment are used to fabricate the micro optics component,and experiment result shows it is available and efficient technique
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2002年第3期271-272,277,共3页
Chinese Journal of Scientific Instrument
基金
国家自然科学基金 (60 0 770 31 )
西安交大"行动计划"[2 0 0 0 ] 0 0 0 0 0 63基金资助项目
