TiO_2功能薄膜的制备及影响其光催化活性的因素

Preparation of TiO_2 functional thin films and factors influencing their photocatalytic activity

近些年来 ,TiO2 功能薄膜以其卓越的性能 ,尤其是优异的光催化性能引起研究人员的广泛关注。本文根据国内外近期TiO2 功能薄膜的研究现状 ,对化学气相沉积法、水解 -沉淀法、液相沉积法、溶胶 凝胶法、原子层沉积法、溅射法、激光辅助分子束沉积法等化学和物理制备方法进行评述 ,并比较详细地探讨了表面羟基含量、膜的厚度和孔径、结晶形态、基片种类、掺杂和光强度等因素对TiO2

Recently, TiO2 functional thin films have attracted many researchers attention for their excellent properties, especially outstanding photocatalytic activity. Based on the current study on TiO2 functional thin film materials, we reviewed chemical and physical methods of preparation such as chemical vapor deposition, hydrolysis-precipitation, liquid phase deposition, sol-gel technology, atomic layer deposition, sputtering, laser assisted molecular beam deposition. And the influence on TiO2 thin films photocatalytic activity by content of surface hydroxyl, thickness of films, pore size, crystal structure, substrates, adulteration, intensity of light, etc., were discussed in detail.