尘埃粒子计数器计数损失的分析研究

Analysis and study of the counting loss of airborne particle counter

光散射式尘埃粒子计数器是用来测量空气洁净度的重要仪器,粒子计数器的主要测量误差为重叠损失误差。本文介绍了产生计数损失误差的原因,应用Poisson随机过程分析确定了粒子计数器的计数损失,并提出了测量计数损失的实验方法。最后,给出使用粒子计数器测量中减少计数损失的方法。

Airborne particle counter (APC) is important instrument for air cleanliness certification in cleanroom. The main error of APC is coincidence loss. We present the reason of counting loss and the analysis of APC's counting loss error with Poisson random process. The testing method to measure the counting loss of calibrated APC is suggested as well. Finally, the suggestion on reducing counting loss APC is provided.