半导体超净厂房纯气系统及实例

Semiconductor super-clean workshop pure gas system and exam-ples

简述半导体芯片制造中所用气体的纯度标准,并通过实例,对制备方法及流程、输送系统设计及特点、气体站设计以及参数的检测等进行了阐述。

The summary of the purity critiria of these gases having been used to make semiconductor-chip,and some examples been given for expatiating on producing methods and flow,designing characteristic of transportation system,designing of gas -station and testing of parameters,etc.