摘要
以可溶性无机盐为原料 ,通过溶胶 -凝胶法在 Al2 O3基片上制备了 Sr Bi2 Ta2 O9(SBT)铁电陶瓷薄膜 .实验结果表明 ,在前驱体溶胶制备中 ,络合剂的种类对溶胶的稳定性和 SBT相薄膜的形成有重要影响 .在以EDTA和乙二醇为络合剂时 ,易形成均匀稳定的溶胶和单一相的 SBT薄膜 .在薄膜制备工艺中 ,Bi2 O3的高温挥发性和薄膜的退火温度是控制制备过程的关键因素 .当 Bi过量 40 % ,且在 70 0℃的温度下退火热处理 ,可以制备出符合化学计量比、结晶性较好、具有均匀晶粒尺度的 Sr Bi2 Ta2 O9铁电陶瓷薄膜 .
A sol gel method was developed for the preparation of SrBi 2Ta 2O 9(SBT) ferroelectric ceramic thin films using soluble inorganic salts Sr(NO 3) 2?Bi(NO 3) 3 and HTaF 6 in the presence of citric acid, EDTA and ethylene glycol as organic coordination agents. The results showed that the coordination agents in the precursor solution are an important factor affecting the stability of sol and formation of SBT phase. The solution coordinated with EDTA and glycol could form a stable and homogeneous sol and produce a single SBT phase thin films by spin coat approach on Al 2O 3 substrate. The effects of volatility of Bi 2O 3 at high temperature and the annealing temperatures of the films on the preparation were also discussed. A smooth, well crystallized, stoichiometric SrBi 2Ta 2O 9 ferroelectric thin film with uniform crystallite size could be obtained on Al 2O 3 substrate at calcining temperature of 700 ℃ in an oxygen atmosphere from the Bi being feeded in excess of 40%.
出处
《应用化学》
CAS
CSCD
北大核心
2002年第6期531-534,共4页
Chinese Journal of Applied Chemistry
基金
国家自然科学基金资助重大项目 (5 9995 5 2 0 )
