摘要
从电子工业的角度出发,介绍激光微细加工的应用,包括:激光打标、细导线剥离、微透镜列阵、激光光刻、激光表面改性等,并综述了它们的研究现状和未来发展趋势。
Being mature applicationand vigorousvitality,the technologyof laserare expoundingtheir boundless potentialityin many territory.Not only the applicationof laser micro-machiningin electronic industryare describedin this paper,includinglaser mark,peelingtiny lead,microlcnarrays,laser lithographyand laser changingproperty,but also their researchstatus and developingprospects are describedin brief.
关键词
激光
微细加工
电子工业
光刻
laser
micro-machining
lithography
electronicindustry
